| 摘要 |
<p>PURPOSE:To improve transparency, heat resistance, chemical resistance, sputtering resistance, adhesion, etc., by incorporating specific (meth)acrylate polymer, etc., into the compsn., thereby obtaining a coating film which can be etched by a developer having less toxicity and obviating the degradation in properties. CONSTITUTION:This compsn. contains four components; (A), (B), (C) and (D). (A) An epoxy group-contg. (meth)acrylate contg. the structural unit expressed by formula I and the structural unit expressed by formula II as main structural units and having 0.05 to 1 ultimate viscosity at 30 deg.C in diethylene glycol dimethyl ether. (B) A (meth)acrylic polymer contg. >=1 kinds of carboxylic group and polyvalent carboxylic anhydride group having 0.05 to 1 ultimate viscosity at 30 deg.C in the diethylene glycol dimethyl ether. (C) A monomer having a (meth)acrylic group. (D) A photopolymn. initiator. In the formulas I, II, R<1> and R<2> are independently a hydrogen group or 1 to 5C hydrocarbon group; m denotes an integer from 1 to 4.</p> |
