| 摘要 |
<p>PURPOSE:To provide a chucking device which is inexpensive, simple in the mechanism thereof and generates less dust by mounting a bellows expanding and contracting with normal and negative pressures on a chucking head guided by a guide. CONSTITUTION:Bellows 5, 5, 5, 5 are contracted by the application of negative pressure to the inside by a positive/negative pressure generator. When they 5, 5, 5, 5 are contracted respective chucking heads 7, 7, 7, 7 fixed at the fore end of the bellows 5, 5, 5, 5 through a head support slider 12 retreat along a guide 8. Each bellows 5 is expanded by the application of positive pressure to the inside of the bellows 5. When the bellows 5 elongates each chucking head 7 advances along a guide 8. The chucking head 7 can advance or retreat by the aid of the bellows 5 and the guide 8.</p> |
