METHOD AND APPARATUS FOR REGENERATING GAS FOR GAS LASER

摘要

PURPOSE:To regenerate mixed gas used in a laser equipment without reducing the laser power by bringing mixed gas from a laser oscillator into contact with a heater/catalyst to cause a catalystic reaction, cooling the reacted mixed gas to a temperature suitable for laser oscillation, and returning the cooled gas to the laser oscillator. CONSTITUTION:The apparatus is for regenerating mixed gas to reuse it for a laser deteriorated due to use in laser oscillation through catalystic reaction with heating. A laser oscillator 1 and gas regeneration device 2 comprise a gas circulation path. The gas regeneration device is provided with a heater/ catalyst 3. The heater/catalyst 3 is so constituted that a catalyst is held on the surface of a heater for heating mixed gas to react by-product gas contained therein. The apparatus is also provided with a gas cooler 4 which cools reacted mixed gas; blower 5 which returns regenerated gas to the laser oscillator; and heating source 6 for the heater.