BLAST CLEANING METHOD AND APPARATUS USING CARBON DIOXIDE GAS,申请号JP19910056385-传众专利搜索

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发明名称	BLAST CLEANING METHOD AND APPARATUS USING CARBON DIOXIDE GAS
摘要
申请公布号	JPH04291726(A)	申请公布日期	1992.10.15
申请号	JP19910056385	申请日期	1991.03.20
申请人	FUJITSU LTD	发明人	FUJIE NOBUO
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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