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发明名称
PECVD:n avulla kasvatetut epähomogeeniset ohuet kalvot
摘要
申请公布号
FI941861(A0)
申请公布日期
1994.04.21
申请号
FI19940001861
申请日期
1994.04.21
申请人
GOLDSTAR CO., LTD.
发明人
WAGNER, JOHN F.;LIM, SUNG KYOO;RYU, JAE HWA
分类号
C23C16/44;C23C;C23C14/54;C23C16/455;C23C16/50;C23C16/52;G02B6/13;(IPC1-7):C23C
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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