| 发明名称 |
Method for evaluating performance of aluminum alloy wiring film |
| 摘要 |
A method for evaluating performance of an aluminum alloy wiring film includes the steps of forming a first aluminum alloy film on a substrate, forming a second aluminum alloy film on another substrate, measuring hardness of the both films, and evaluating the superiority of stressmigration of the aluminum alloy films by comparison between the films in hardness.
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| 申请公布号 |
US5299450(A) |
申请公布日期 |
1994.04.05 |
| 申请号 |
US19920871757 |
申请日期 |
1992.04.21 |
| 申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
NAKAGAWA, TOSHIAKI;MIYATAKE, HISAKAZU |
| 分类号 |
G01N3/40;G01N33/20;H01L21/3205;H01L21/66;H01L23/52;(IPC1-7):G01N3/40 |
主分类号 |
G01N3/40 |
| 代理机构 |
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