SPIN COATING METHOD,申请号JP19920238717-传众专利搜索

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发明名称	SPIN COATING METHOD
摘要
申请公布号	JPH0689868(A)	申请公布日期	1994.03.29
申请号	JP19920238717	申请日期	1992.09.08
申请人	FUJI ELECTRIC CO LTD	发明人	FURUHATA HIROAKI;OKABAYASHI TAKEKI;KUBOTA NAGATOSHI
分类号	H01L21/225;(IPC1-7):H01L21/225	主分类号	H01L21/225
代理机构		代理人
主权项
地址

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