发明名称 |
CONTAINER STAIN MONITORING DEVICE |
摘要 |
<p>PURPOSE:To provide a container stain monitoring device by which container stain can be monitored accurately by using an optical means without relying on an experience. CONSTITUTION:In a device to monitor stain on a wall surface of a container, the device has a light source 1 arranged outside of the container, a light transmissive material 12 arranged on the wall surface of the container so as to introduce light from the light source 1 to a mirror surface in the container and a dark field microscope 4 to receive the light passed through the light transmissive material 12 in the shape of scattered light from a foreign matter existing on the mirror surface.</p> |
申请公布号 |
JPH0674912(A) |
申请公布日期 |
1994.03.18 |
申请号 |
JP19920247283 |
申请日期 |
1992.08.24 |
申请人 |
EBARA CORP |
发明人 |
SHINOZUKA SHUHEI;ONO KOJI;MATSUMURA MASAO |
分类号 |
G01N21/47;G01N21/88;G01N21/94;G01N21/954;G01V8/14;H01L21/304;H01L21/673;H01L21/68;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/47 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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