发明名称 CONTAINER STAIN MONITORING DEVICE
摘要 <p>PURPOSE:To provide a container stain monitoring device by which container stain can be monitored accurately by using an optical means without relying on an experience. CONSTITUTION:In a device to monitor stain on a wall surface of a container, the device has a light source 1 arranged outside of the container, a light transmissive material 12 arranged on the wall surface of the container so as to introduce light from the light source 1 to a mirror surface in the container and a dark field microscope 4 to receive the light passed through the light transmissive material 12 in the shape of scattered light from a foreign matter existing on the mirror surface.</p>
申请公布号 JPH0674912(A) 申请公布日期 1994.03.18
申请号 JP19920247283 申请日期 1992.08.24
申请人 EBARA CORP 发明人 SHINOZUKA SHUHEI;ONO KOJI;MATSUMURA MASAO
分类号 G01N21/47;G01N21/88;G01N21/94;G01N21/954;G01V8/14;H01L21/304;H01L21/673;H01L21/68;(IPC1-7):G01N21/88 主分类号 G01N21/47
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