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发明名称
CONVEYER FURNACE
摘要
申请公布号
JPH0674655(A)
申请公布日期
1994.03.18
申请号
JP19920226811
申请日期
1992.08.26
申请人
FUJITSU LTD;KYUSHU FUJITSU ELECTRON:KK
发明人
IRYO KENJI
分类号
F27B9/04;H01L21/324;(IPC1-7):F27B9/04
主分类号
F27B9/04
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代理人
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