| 摘要 |
<p>PURPOSE:To improve the measurement precision by removing a mechanical error of the optical position measuring instrument. CONSTITUTION:The optical position measuring instrument consists of light beam emitting means 1R and 1L which emit light beams, deflecting means 2R and 2L which deflect the light beams, a position indicating means 4 which detects the deflected light beams VR and VL passing a specified position, and a deflection quantity indicating means 4 which measures the deflection quantities of the light beams VR and VL in synchronism with the detection. This deflection quantity detecting means consists of light beam detecting means 3R and 3L which are interposed between the deflecting means 2R and 2L, and position indicating means 4 and optically detect the directions of the direct light beams VR and VL.</p> |
