PRODUCTION OF RARE EARTH ION-ADDED OPTICAL WAVEGUIDE FILM AND OPTICAL WAVEGUIDE

摘要

PURPOSE:To provide the method for forming films having good transmittance without the possibility of incorporating impurities therein which can form core films for optical waveguides added with the rare earth ions of a high refractive index on substrates with lessened warpage and with easy control of the film thicknesses and refractive indices thereof and the process for production of the rare earth ion-added optical waveguide film and optical waveguide which can easily control the amt. of the impurity ions to be added. CONSTITUTION:The substrates 7 are disposed in the upper part in a chamber 2 under evacuation to a vacuum and are heated. An evaporating source 3 is disposed below the substrates 7. Tablets 4 formed by mixing powders of Si3N4 and the oxide of the rare earth element at desired weight ratios, then solidifying the mixture by a hot press are housed into the evaporating source 3 and thereafter, the tablets 4 are irradiated with electron beams while gaseous O2 is introduced into the chamber 2, by which the tablets are evaporated and the optical waveguide films of Six0yNz contg. the rare earth ions are formed on the substrates 7.