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经营范围
发明名称
METHOD FOR WELDING CLEAN CHAMBER
摘要
申请公布号
JPH0671434(A)
申请公布日期
1994.03.15
申请号
JP19910126302
申请日期
1991.05.30
申请人
OMI TADAHIRO;HITACHI ZOSEN CORP;NICHIZOU SEIMITSU KENMA KK
发明人
OMI TADAHIRO;NAKAJIMA HIROYUKI;OTSUKA TAKAO;KITAGAWA SHIYOUICHI;BABA YOSHIYASU;SATO KENJI
分类号
B23K9/00;B23K9/16;B23K9/29;B23K9/32;H01L21/02;(IPC1-7):B23K9/00
主分类号
B23K9/00
代理机构
代理人
主权项
地址
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