METHOD FOR FORMING TITANIUM FILM,申请号JP19920245512-传众专利搜索

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发明名称	METHOD FOR FORMING TITANIUM FILM
摘要
申请公布号	JPH0669157(A)	申请公布日期	1994.03.11
申请号	JP19920245512	申请日期	1992.08.21
申请人	SONY CORP	发明人	KOMATSU YUJI
分类号	H01L21/205;H01L21/28;H01L21/285;(IPC1-7):H01L21/285	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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