发明名称 WIRE BONDING APPARATUS
摘要 PURPOSE:To reduce damage to a metal fine wire due to operator's work, work time and mistake by eliminating a metal fine wire introducing operation by operator's forceps at the time of replacing the wire. CONSTITUTION:A sprue 1 and a metal fine wire 5 are stored in a vessel 2 in a state to be passed through a guide 3 and a capillary 4. The sprue 1, the guide 3 and a nozzle 16 for injecting dry air are provided by mounting on a head 15 of an adapter 2. Thus, a manual operation is not required in an operation for holding the wire 5, and the wire 5 is not damaged.
申请公布号 JPH0669267(A) 申请公布日期 1994.03.11
申请号 JP19920242682 申请日期 1992.08.19
申请人 NEC CORP 发明人 SATO HIDEAKI
分类号 H01L21/60 主分类号 H01L21/60
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