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经营范围
发明名称
SPUTTERING TARGET
摘要
申请公布号
JPH0665727(A)
申请公布日期
1994.03.08
申请号
JP19920247125
申请日期
1992.08.25
申请人
MITSUI MINING & SMELTING CO LTD
发明人
KOBAYASHI SHIGERU;WASHIYAMA YUJI;FUKUEDA SUEO;SETO YASUHIRO
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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