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发明名称
INSPECTING DEVICE FOR SURFACE CONDITION
摘要
申请公布号
JPH0643127(A)
申请公布日期
1994.02.18
申请号
JP19930069498
申请日期
1993.03.29
申请人
TOSHIBA CORP
发明人
KATAGAWA HIROSHI;TERADA SHIGEKI
分类号
G01N25/68;H01L21/66;(IPC1-7):G01N25/68
主分类号
G01N25/68
代理机构
代理人
主权项
地址
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