发明名称 GLASS ETCHING COMPOSITION AND METHOD
摘要 The present invention provides an improved glass etching composition which does not contain any causative materials such as hydrofluoric acid, causing environmental pollution. The etching composition comprises a first solution of a flow modifier and ammonium bifluoride in purified glycerine; and a second solution of ammonium bifluoride and ferric chloride in purified glycerine.
申请公布号 CA2104087(A1) 申请公布日期 1994.02.15
申请号 CA19932104087 申请日期 1993.08.13
申请人 GIMM, SOON H.;KIM, JUNG H. 发明人 GIMM, SOON H.;KIM, JUNG H.
分类号 B44C1/22;C03C15/00;C03C25/68;H01L21/311;(IPC1-7):C03C15/00 主分类号 B44C1/22
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