发明名称 Single step salicidation process
摘要 The present invention generally involves the fabrication of semiconductor devices so as to reduce the active region to interconnect interface resistivity. Fabrication begins by forming active regions on a semiconductor device. Next, a titanium metal of approximately 900 (Aangstroem) thickness is deposited on the semiconductor device. The semiconductor device is then annealed in a single step to form the interconnects.
申请公布号 US5286678(A) 申请公布日期 1994.02.15
申请号 US19920951945 申请日期 1992.09.28
申请人 INTEL CORPORATION 发明人 RASTOGI, RAJIV
分类号 H01L21/285;(IPC1-7):H01L21/28 主分类号 H01L21/285
代理机构 代理人
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