发明名称 III GROUP AND V GROUP MES FIELD EFFECT TRANSISTOR AND METHOD OF FABRICATING SAME
摘要 A power MESFET comprises a layer (4) of a III-V semi-conductor material (particularly gallium arsenide) not exceeding 20 mu m (preferably not exceeding 10 mu m) in thickness, one face of the layer (4) being provided with an active surface zone (7) and source (41)-, drain (42)-, and gate (43)- electrodes, and the opposite rear face with a heat-dissipating metal coating (51). In production, the layer (4) is initially supported on a GaAs substrate which is etched away after an auxiliary carrier is fixed to the free face of the layer (4). <IMAGE>
申请公布号 JPS55115369(A) 申请公布日期 1980.09.05
申请号 JP19800019654 申请日期 1980.02.19
申请人 SIEMENS AG 发明人 DEIITORIHI RISUTOU
分类号 H01L29/80;H01L21/3063;H01L21/338;H01L23/34;H01L23/36;H01L29/812 主分类号 H01L29/80
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