发明名称 METHOD FOR COMPENSATING FOR EDGE SHRINKAGE, CAPACITOR, WHOSE EDGE SHRINKAGE IS COMPENSATED, AND RESISTOR, WHOSE EDGE SHRINKAGE IS COMPENSATED
摘要 PURPOSE: To compensate change of a capacitor ratio for an IC by equalizing a ratio of length of exposed outer peripheries of two capacitor cells to a desired capacitor ratio for the two capacitors. CONSTITUTION: A dummy cell and a unit cell are disposed so that relative shrinkage amounts between two capacitors become the same as a desired capacitor ratio. That is, dummy cells 700, 710 are disposed opposite to unit cells 510a of the capacitor. Dummy cells 720, 730 are further disposed at both sides of a linear array to unit cells 520a to 520c for constituting a capacitor 520. Edge shrink occurs at two opposite sides of cells 510a, 520a to 520c. Thus, accurate capacitor ratio is held, without wasting precious area, by considering the edge shrinkage effect of both the cells.
申请公布号 JPH065780(A) 申请公布日期 1994.01.14
申请号 JP19930030620 申请日期 1993.02.19
申请人 SILICON SYST INC 发明人 JIEIMUZU DANKURII
分类号 H01L27/04;H01G13/00;H01L21/82;H01L21/822;H01L27/08;(IPC1-7):H01L27/04 主分类号 H01L27/04
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