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发明名称
摘要
申请公布号
JPH063728(B2)
申请公布日期
1994.01.12
申请号
JP19850239266
申请日期
1985.10.25
申请人
MAIKURION CORP
发明人
JON EI DEYUHAATEI;BIRII DABURYUU WAADO;DEEBITSUDO SHII SHEIUAA
分类号
H01J37/317;H01J37/02;H01J37/30;H01J37/305;H01L21/027;H01L21/302;(IPC1-7):H01J37/317
主分类号
H01J37/317
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