PULSE LASER DISCHARGE UNIT

摘要

PURPOSE:To provide a pulse laser discharge unit capable of performing stable laser oscillation and highly repeated operation by removing a cracked and heated laser gas efficiently to the outside of a discharge region by a blower having a low power consumption. CONSTITUTION:A pulse laser discharge unit is equipped with a blower 12 for supplying wind to discharge electrodes 1a and 1b inside a gas container and also has wind guides 13 at a window 10 of conductors 2a and 2b, which fix the discharge electrodes 1a and 1b, for guiding wind from the blower 12 to the surface of discharge electrodes 1a and 1b.