A mass flow controller (10) includes a base bypass block (12) having a flow rate sensor unit (18) connected thereto. The flow sensor (18) generates a flow signal in response to a flow of gas therethrough. A set point signal is received and combined with an internally generated set point correction signal to produce a corrected set point signal. The corrected set point signal is compared with the flow signal to produce an error signal. The error signal is used to drive a valve (20) connected to the bypass block (12) to control the flow of gas.
