发明名称 |
Apparatus for adjusting a focal position of an electron beam and electron beam projection apparatus including the same |
摘要 |
An electron beam projection apparatus providing a magnetic refocusing lens for adjusting a focal position of an electron beam on an object. An axis of an auxiliary magnetic field produced by the magnetic refocusing lens is required equivalently to agree to that of a convergent magnetic field produced by a magnetic object lens. An inclination adjustment apparatus of the magnetic refocusing lens provides a rolling mechanism being independently rotatable on two axes being perpendicular to each other and also perpendicular to a direction of an axis of a convergent magnetic field. With this inclination adjustment apparatus, adjustment operation is improved.
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申请公布号 |
US5272347(A) |
申请公布日期 |
1993.12.21 |
申请号 |
US19920968144 |
申请日期 |
1992.10.29 |
申请人 |
FUJITSU LIMITED |
发明人 |
OAE, YOSHIHISA;YAMADA, AKIO;YASUDA, HIROSHI |
分类号 |
H01J37/141;H01J37/21;H01J37/305;H01J37/317;(IPC1-7):H01J37/141 |
主分类号 |
H01J37/141 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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