EVALUATION OF GETTERING POWER OF SILICON WAFER,申请号JP19920129157-传众专利搜索

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发明名称	EVALUATION OF GETTERING POWER OF SILICON WAFER
摘要
申请公布号	JPH05326529(A)	申请公布日期	1993.12.10
申请号	JP19920129157	申请日期	1992.05.21
申请人	NIPPON STEEL CORP	发明人	NAKASHIZU TSUNEO
分类号	C30B29/06;C30B33/02;H01L21/322;(IPC1-7):H01L21/322	主分类号	C30B29/06
代理机构		代理人
主权项
地址

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