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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05315384(A)
申请公布日期
1993.11.26
申请号
JP19920121497
申请日期
1992.05.14
申请人
NEC CORP
发明人
TATEISHI YUICHI
分类号
H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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