| 摘要 |
PURPOSE:To execute positioning and attitude measurement of a mounting tool of a semiconductor device accurately in a short time. CONSTITUTION:Gray image information obtained by an image pickup means 21 is converted into binary-coded image information and given to an end part position measuring means 23. The end part position measuring means 23 sets measuring straight lines crossing virtually orthogonally on each conductive member of a mounting tool of a semiconductor device, and based on these measuring straight lines and binary-coded image information on the conductive member of the mounting tool of the semiconductor device, it executes scanning on the measuring straight lines and measures the end part position of the conductive member of the mounting tool of the semiconductor device. Based on the end part position obtained and the gray image information thereon, a gray centroid computing means 25 computes a gray centroid for the conductive member to which the end part belongs and further computes the gray centroid for adjacent conductive members sequentially. According to this constitution, the gray centroid of each conductive member can be obtained. |
