| 摘要 |
PURPOSE:To prevent the degradation in the detection accuracy of a development stop level by the generation of the multiplex interferences of the diffracted beam from a laser beam source by the unequal thicknesses of a glass substrate in the developing device using a laser beam source to be used at the time of producing the master disk for an optical recording disk, such as video disk. CONSTITUTION:A developer 6 is supplied to a photosensitive film 2 while the disk substrate 3 formed with this photosensitive film 2 is kept rotated. While the exposed parts of the photosensitive film 2 are dissolved by this developer 6, the exposed parts are irradiated with a monitor beam 8 from the laser beam source 7. The diffracted beam 9 is detected by a photoelectric conversion means 12 and the progression of the development is stopped in accordance with the result of this detection. The photosensitive film 2 is irradiated with the laser beam of a short coherent length which does not generate the multiple interferences in the diffracted beam 8 by the unequal thicknesses of the disk substrate 3 as the monitor beam 8. |
