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发明名称
MASS SEPARATOR AND ION IMPLANTATION DEVICE
摘要
申请公布号
JPH05266860(A)
申请公布日期
1993.10.15
申请号
JP19920065133
申请日期
1992.03.23
申请人
发明人
分类号
H01L21/265;C23C14/48;H01J37/317;H01J49/30;(IPC1-7):H01J49/30
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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