| 摘要 |
PURPOSE:To provide a high output and high accuracy microactuator suitable for microfabrication in which self-holding state can be realized. CONSTITUTION:The microactuator comprises a magnetomotive force generating source, i.e., a permanent rod magnet 2a, a group of fixed poles 2 arranged linearly or circularly at same intervals with a heatsensitive magnetic body 2c being disposed in the magnetic path of the permanent rod magnet 2a, a driven body A planted, at same intervals, with a plurality of magnetic poles 1a opposing to and corresponding with the fixed magnetic poles 2, and a temperature control means for sequentially heating and/or cooling each heatsensitive magnetic body 2c in the fixed magnetic pole 2 group in the order of arrangement of fixed magnetic pole 2 group. |
