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发明名称
(B2) ;HANDOTAISOSHINOMASUKINGUTEEPUHARITSUKESOCHI
摘要
申请公布号
JPH05259576(A)
申请公布日期
1993.10.08
申请号
JP19910060169
申请日期
1991.03.25
申请人
发明人
分类号
H01L21/02;H01S5/00;(IPC1-7):H01S3/18
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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