| 摘要 |
PURPOSE:To eliminate the damage of a screw and to prevent the falling out of a crystal rod by providing a specified eccentric dowel to a cylindrical adapter at the lower end of a driving shaft for the crystal rod of the FZ-process semiconductor single crystal producing device and opening the dowels. CONSTITUTION:The upper end of a silicon polycrystal rod P provided to a gravitational clamping holder 22 for the rod is smoothly inserted into an adapter 24 by opening >=3 eccentric dowels 34 symmetrically fixed in the cap screw 46, retaining plate 38 and adapter 24. When the inserted rod P tends to fall down by gravity, the dowels 34 are rotated downward by the contact friction between a cam face 36 and the rod P, hence the radius of the dowel 34 is increased to produce a clamping force, and the rod P is clamped and held by the dowels 34. The cap screw 46 is then screwed in downward, the retaining plate 38 and a retaining leg 40 are actuated to rotate the dowel 34 downward and pressed on the side face of the rod P, and the polycrystal rod is more surely clamped and held. |
