HARDENING TREATMENT OF WATER-SOLUBLE PHOTORESIST PATTERN

摘要

PURPOSE:To provide a hardening treatment method for a water-soluble photoresist with no problem on handleability and harmfulness. CONSTITUTION:When a water-soluble photoresist pattern based on casein is treated with a hardening agent and heated to strengthen the corrosion resistant coating film of the resist pattern, an aq. soln. contg. ammonium zirconium carbonate as an essential component is used as the hardening agent. Hardening treatment giving an increased etching factor can be carried out with no problem on handleability and harmfulness and such problem as the pollution of waste water by Cr caused by a conventional hardening agent is solved.