摘要 |
An apparatus for preionization of a pulsed gas laser comprises corona preionization electrodes (12, 12') which are each arranged adjacent a respective associated main electrode (10, 10'). To generate an effective preionization with low constructional and circuit expenditure the preionization electrodes (12, 12') are set under voltage with the same high-voltage source (16) which also supplies the main electrodes (10, 10') with voltage. By means of an inductance (30) a time delay is set between the excitation of the preionization electrodes and the triggering of the main discharge between the main electrodes (10, 10').
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