| 摘要 |
PURPOSE:To reduce the time for regulating gaseous pressure and to improve reproducibility and stability in a device for introducing gas into a vacuum vessel by providing an intermediate evacuation pump system between the vacuum vessel and a controller for regulating the flow rate of the gas. CONSTITUTION:An intermediate evacuation pump system 5 is provided between a vacuum vessel 1 and a controller for regulating the flow rate of gas, that is, a stop valve 2, in a device for introducing the gas into the vessel 1. A valve 10 is closed and a valve 3 is opened in the case of supplying the gas into the vessel 1. The valve 3 is held closed and the valve 10 is held open to run the gas to the system 5 to prevent the gas from stagnating in the piping part 4 among the variable valve 2, the valve 3 and the valve 10 if there is no need for supplying the gas to the vessel 1. The evacuation speed of the system 5 is maintained at the same speed as that of a main evacuation system 6 connecting to the device 1. |
