申请人 |
DAINIPPON SCREEN MFG. CO., LTD., KYOTO, JP |
发明人 |
SASADA, SHIGERU C/O DAINIPPON SCREEN MFG. CO. LTD., HORIKAWA-DORI KAMIKYO-KU KYOTO, JP;NAGATA, SHINICHI C/O DAINIPPON SCREEN MFG. CO. LTD, HORIKAWA-DORI KAMIKYO-KU KYOTO, JP;HIROSAWA, MAKOTO C/O DAINIPPON SCREEN MFG. CO. LTD, HORIKAWA-DORI KAMIKYO-KU KYOTO, JP;KISHIDA, YOSHIHIRO DAINIPPON SCREEN MFG. CO.LTD, HORIKAWA-DORI KAMIKYO-KU KYOTO, JP |