BOAT FOR VERTICAL FURNACE

摘要

PURPOSE:To provide a boat for a vertical furnace in which a wafer is not warped by suppressing the deflection of the wafer due to its own weight during the heat treating. CONSTITUTION:The boat for a vertical furnace comprises a plurality of poles 11-14 and a plurality of supporting plates 17 provided at the poles 11-14 in a state in parallel with a state substantially perpendicular to the poles 11-14. Or, a movable insert in which a conveying arm of a wafer conveyor for conveying a wafers 100 can be movably inserted is formed at the plate 17. A plurality of protrusions are provided on a surface of the plate 17 of the side for placing the wafer 100 or a plurality of holes are provided at the plate 17.