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发明名称
SAMPLE HOLDER
摘要
申请公布号
JPH05222532(A)
申请公布日期
1993.08.31
申请号
JP19920059073
申请日期
1992.02.12
申请人
ULVAC JAPAN LTD
发明人
SHIMIZU SABURO;SASAKI NORIYASU
分类号
C23C14/50
主分类号
C23C14/50
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代理人
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