| 摘要 |
PURPOSE:To make an accurate control of a nozzle pressure and to accurately control the stable nozzle back pressure against the response lag of a sensor by detecting the nozzle back pressure with a sensor located just before the nozzle and providing a compensator. CONSTITUTION:A nozzle back pressure sensor 6 placed just before a nozzle 4 detect the nozzle back pressure accurately, resulting in preventing the influence due to the pressure loss in a conduit line 3. Further a compensator 7 integrates the deviation signal between a back pressure feedback signal BS and a set pressure value signal OS, adjusting the noise back pressure by means of a control signal Cs. As a result, the time deviation becomes zero in steady state, further the response lag of the sensor 6 prevent the pressure control system from being unstable, performing the stable nozzle back pressure. In short, the circuit 7 generates and compensates a control signal CS based on the pressure information and the set pressure information of the fluid under control detected by the sensor 6 is supplied to a pressure adjustment valve 1, resulting in stabilizing the nozzle back pressure control. |
