| 摘要 |
PURPOSE:To stabilize the scanning operation of a probe head by bringing the housing of the probe head into contact with a contact plane through point- contact legs while urging the housing through a leaf spring. CONSTITUTION:Three point-contact sections are formed on the bottom of the leg section of the housing 10 of a probe head 12 by fitting three steel balls 11 to the bottom. In addition, the housing 10 is connected to a fixed table 36 which is the enclosure of the title positioning device by means of a leaf spring 13 arranged in parallel to a contact plane and the spring 13 is fixed to the table 30 with screws 17. When the relative position between a sample 4 and the probe head 13 is controlled by the three-point contact in such way, three degrees of freedom are ensured in the X-and Y-directions in the plane of the sample 4 and the revolving motion around Z-axis and the remaining motions are constrained. By using the spring 13 as means for constraining the remaining degrees of freedom, all of the degrees of freedom of the head 12 can be constrained without estranging the stable three-point contact. The head 12 can be set at a high resonance frequency by utilizing the properties of the spring 13 and, as a result, not only a high vibration-proofing effect can be obtained, but also the scanning operation of the head 12 can be stabilized. |
