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发明名称
OPTICAL CVD DEVICE
摘要
申请公布号
JPH05198512(A)
申请公布日期
1993.08.06
申请号
JP19910257985
申请日期
1991.10.04
申请人
ULVAC JAPAN LTD
发明人
ITSUDO SHIGEFUMI;TAMAGAWA KOICHI;TAKAHASHI SEIICHI
分类号
H01L21/205;H01L21/22;H01L21/223
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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