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发明名称	FORMATION OF RESIST PATTERN
摘要
申请公布号	JPH05198501(A)	申请公布日期	1993.08.06
申请号	JP19920008723	申请日期	1992.01.21
申请人	MITSUBISHI ELECTRIC CORP	发明人	UOTANI SHIGEO;ISHIBA TERUAKI
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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