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经营范围
发明名称
CVD DEVICE
摘要
申请公布号
JPH05190456(A)
申请公布日期
1993.07.30
申请号
JP19920005452
申请日期
1992.01.16
申请人
HITACHI LTD
发明人
TSUJI YOICHIRO;KUWAKI KATSUNORI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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