发明名称 Apparatus for optically reading and discriminating symbols or characters represented by indentations formed on the surface of a sample
摘要 A symbol/character discrimination apparatus having a dark-field light source for applying light beams at a predetermined angle of incidence to the surface of a sample on which symbols and/or characters are formed in an indentation pattern, a CCD camera for detecting reflected light beams from the sample surface, and a condensing lens for illumination, diaphragm, and objective optical lens for detection, arranged between the CCD camera and the sample and having a common optical axis. The condensing lens is located between the light source and the sample to condense the light beams from the light source on the surface of the sample and guides the reflected light beams from the sample to the diaphragm. The diaphragm intercepts regularly reflected light beams among the reflected light beams and guides some of the irregularly reflected light beams to the objective optical lens for detection. The objective optical lens guides some of the irregularly reflected light beams to the CCD camera.
申请公布号 US5227642(A) 申请公布日期 1993.07.13
申请号 US19910814795 申请日期 1991.12.31
申请人 TOKYO ELECTRON YAMANASHI LIMITED 发明人 SHIMIZU, SHIGEAKI
分类号 H01L21/02;G06K7/10 主分类号 H01L21/02
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