COATING LIQUID APPLYING DEVICE

摘要

PURPOSE:To obviate the generation of turbulence in a cup when the cup of the coating liquid applying device having a spinner is rotated. CONSTITUTION:A bottom plate 21 of an inner cup 20 is fixed to the top end of a follow revolving shaft 12 of a spinner device and an annular wall body 23 is erected on the peripheral edge on the upper surface of the bottom plate 21 thereof. A base part 25 having the shape approximately resembling the shape of a glass substrate is provided on the bottom plate 21 and an aperture 26 is formed at the center of this base part 25. A projecting line 27 pressed to the peripheral edge on the back surface of the glass substrate W is formed on the outer periphery of the upper surface of the base part 25 and a seal 28 is provided atop this projecting line 27.