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发明名称
SPINNER
摘要
申请公布号
JPH05154430(A)
申请公布日期
1993.06.22
申请号
JP19910349384
申请日期
1991.12.09
申请人
SHIBAURA ENG WORKS CO LTD
发明人
HIROSE HARUMICHI
分类号
B05C11/08;G09F9/35;H01L21/027
主分类号
B05C11/08
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代理人
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