PRODUCTION OF SEMICONDUCTOR ELEMENT FORMATION SUBSTRATE,申请号JP19910091578-传众专利搜索

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发明名称	PRODUCTION OF SEMICONDUCTOR ELEMENT FORMATION SUBSTRATE
摘要
申请公布号	JPH05152549(A)	申请公布日期	1993.06.18
申请号	JP19910091578	申请日期	1991.03.29
申请人	SHIN ETSU HANDOTAI CO LTD;NAGANO DENSHI KOGYO KK	发明人	ITO TATSUO;UCHIYAMA ATSUO;FUKAMI MASAO
分类号	H01L21/02;H01L27/12	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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