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发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPH05152207(A)
申请公布日期
1993.06.18
申请号
JP19910314414
申请日期
1991.11.28
申请人
TOSHIBA MACH CO LTD
发明人
KOBAYASHI TAKEHIKO;NAKAGAWA YOSHINORI;MITANI SHINICHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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