发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To prevent high frequency radiation noise from a semiconductor integrated circuit device including a digital circuit which operates at a high speed. CONSTITUTION:Conductive layers 506, 507, 508 are provided in an uppermost layer of a multilayer interconnection structure to cover specified circuit parts 501, 502 and signal lines 510, 511, 512, 514, 552 of a semiconductor integrated circuit device 500, and the uppermost layer conductive layers 506, 507, 508 are connected to a fixed electric potential. The uppermost layer conductive layer is formed on only a region which becomes a high frequency radiation noise generation source; thereby, it is possible to absorb radiation noise from the high frequency radiation noise generation source effectively and to use a remaining region of the uppermost layer for other wiring layer.
申请公布号 JPH05152291(A) 申请公布日期 1993.06.18
申请号 JP19910316977 申请日期 1991.11.29
申请人 MITSUBISHI ELECTRIC CORP 发明人 HAMANO HISANORI
分类号 H01L21/3205;G11C7/02;H01L21/822;H01L23/52;H01L23/522;H01L23/552;H01L23/58;H01L27/04 主分类号 H01L21/3205
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