| 摘要 |
<p>PURPOSE:To precisely and speedily measure the phase shift quantity of a phase member which shifts the phase of light. CONSTITUTION:A body to be inspected which has the phase member 9c shifting the phase of the light is lighted with coherent dual-slit light and a Fourier image formed with the light from the body to be inspected is detected. Further, the body to be inspected which has the phase member 9c shifting the phase of the light is lighted with coherent parallel light, dual-slit light is generated with the light passed through the body to be inspected, and a Fourier image formed with this dual-slit light may be detected.</p> |
